闭循环扫描台
Closed-Loop Scanner Series“ — ScannerXX.Ultra
Scanners with sub-nanoscale resolution capacitive displacement sensors for closed-loop control
Precision demands a sensor.
Closed-loop scanner with a displacement sensor actively compensates the negative effects such as environment temperature drift, piezoelectric creep and self-heating, achieving unprecedented precision at low temperatures, which ensures the sophisticated experiments survive at extreme low temperature.
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“25 mm” Series • Scanner25-x.Ultra • Scanner25-x.Ultra.UHV • Scanner25-x.Ultra.ULT • Scanner25-x.Ultra.UHV.ULT • Scanner25-z.Ultra • Scanner25-z.Ultra.UHV • Scanner25-z.Ultra.ULT • Scanner25-z.Ultra.UHV.ULT |
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“35 mm” Series • Scanner35-xy.Ultra • Scanner35-xy.Ultra.UHV • Scanner35-xy.Ultra.ULT • Scanner35-xy.Ultra.UHV.ULT • Scanner35-z.Ultra • Scanner35-z.Ultra.UHV • Scanner35-z.Ultra.ULT • Scanner35-z.Ultra.UHV.ULT |
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Default version, compatible with 1E-7 mbar
ULT version, used at He3 or dilution cryogenics systems
UHV version, compatible with 2E-11 mbar
Precision, Spacial Resolution & Repeatability
Precision, also known Standard Deviation ( ISO 3534-2:2006 )
Precision is the closeness of agreement between independent test results obtained under stipulated conditions. The measure of precision is usually expressed in terms of imprecision and computed as a standard deviation of the test results. Less precision is reflflected by a larger standard deviation. [SOURCE: ISO 3534-2:2006,3.3.4]
Spacial Resolution, discussion about the criterion
Resolution is generally defifined as the smallest detectable interval between measured values. For a physical parameter whose measurement values follow a Gaussian distribution N (μ, σ2), a signifificant portion of people equate the standard deviation σ directly with resolution, while others adopt a stricter criterion, such as 3σ. When the measured values are adjacent, the percentage of overlapping area between their Gaussian distributions determines the distinguishability of these two values, which is a critical factor in defifining the resolution.
Example, Spacial resolution of Scanner.Ultra motion
Scanner35-z.Ultra was operated at 4.2 K in a ultra low-vibration cryogenic platform (ColdTABLE*) . The data acquisition from the capacitive sensor showed the RMS noise (σ) during closed-loop control was typically ~0.4 nm. We make scanner to move step by step with 1 nm distance. It is easy to distinguish steps.
Characterization of Bidirectional Repeatability ( ISO 230-2:2006(E) )
The bidirectional repeatability characterization was performed using a laser interferometer (resolution 0.1 nm, sampling rate 50 kHz) to monitor the displacement of scanner. The scanner was programmed to execute bidirectional motion over a 30 um range with 3 um incremental steps ( 20 steps in one cycle ), completing 10 full back- and-forth cycles. The experiments was performed at 4.2 K in a ultra low-vibration cryogenic platform (ColdTABLE) with a MC-ArchimedesLT.Ultra03 controller. The positioning deviation were calculated as Eij = Pmeasure,ij — Pmean,i, where i denotes the target position index and j denotes the cycle number. The fifigure below shows all position deviation in ±5 nm range. According to the defifinition of bidirectional repeatability in ISO 230-2:2006(E) , the bidirectional repeatability of Scanner.Ultra series product is smaller than 5 nm. All parameters MultiFields shows in specifification strictly follow ISO 230-2:2006(E).
The sensor redefifines the motion control at cryogenic temperature
| Our proprietary capacitive displacement sensor delivers subnanometer resolution in cryogenic environments — the core reason why our scanner achieves excellent precision, resolution and repeatability. |
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New Controller - MC-ArchimedesLT.03.Ultra
Multi-channels high-speed controller for closed-loop scanner control
Features
| Capacitive sensing | Sub-nm displacement resolution | Tunable analog bandwidth |
| High-speed Data acquisition | 50 kSa/s sampling rate | Synchronous multi-channel sampling |
| Real-time communication | SPI communication between master and slave | 50 kSa/s stable data transmission | EtherCAT/ EtherNET/ USB3.0 |
| Closed-loop control | Sub-nm resolution at ultra-high speed | Synchronous multi-channel closed-loop control |
Interface & Functions
| Communications | Drive terminals | Sensing terminals |
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* EtherCAT * EtherNET * USB 3.0 |
* Analog in * Analog out * Trigger in * Trigger out * Voltage Output |
* Sensor input * Tuning Knob * Analog out |
Figure.3 Closed- loop scanner controller - MC-ArchimedesLT.03.Ultra. Working together with Multififields® closed-loop scanner , each of three channels maintains synchronous and individual closed-loop control with sub-nm resolution.
Scanner25-x.Ultra
| Features | • Closed-loop control | • 55 um travel range at room temperature | • Ultra-high vacuum & low temperature compatible |
| • Sub-nm resolution |
Picture & dimensions
Specififications
Scanner25-z.Ultra
| Features | • Closed-loop control | • 55 um travel range at room temperature | • Ultra-high vacuum & low temperature compatible |
| • Sub-nm resolution |
Picture & dimensions
Specififications
Scanner35-xy.Ultra
| Features | • Closed-loop control | • 100 × 100 um travel range at room temperature | • Ultra-high vacuum & low temperature compatible |
| • Sub-nm resolution |
Picture & dimensions
Specififications
Scanner35-z.Ultra
| Features | • Closed-loop control | • 100 um travel range at room temperature | • Ultra-high vacuum & low temperature compatible |
| • Sub-nm resolution |
Picture & dimensions
Specififications
